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Title: Alternative gate insulator materials for future generation MOSFETs
Authors: Heyns, Marc
Bender, Hugo
Carter, Richard
Caymax, Matty
Conard, Thierry
De Gendt, Stefan
Degraeve, Robin
De Witte, H
Groeseneken, Guido
Haukka, S
Henson, Kirklen
Houssa, Michel
Kubicek, Stefan
Maes, Jos
Naili, Mohamed
Nohira, Hiroshi
Tsai, Wilman
Tuominen, Marko
Vandervorst, R
Wilhelm, Rudi
Young, Edward
Zhao, Chao
Issue Date: 2001
Conference: International Forum on Semiconductor Technology - IFST; 7-8 March 2001; Antwerpen, Belgium. location:Leuven Belgium
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Electrical Engineering - miscellaneous
Semiconductor Physics Section
Faculty of Engineering Science - miscellaneous
ESAT - MICAS, Microelectronics and Sensors

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