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Title: Atomic layer deposited WNxCy films growth on SiC surfaces
Authors: Martin Hoyas, Ana ×
Whelan, Caroline
Schuhmacher, Jorg
Maex, Karen
Celis, Jean-Pierre #
Issue Date: 2006
Series Title: Microelectronic Engineering vol:83 issue:11-12 pages:2068-2071
Article number: doi:10.1016/j.mee.2006.09.010
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
Chemical and Extractive Metallurgy Section (-)
× corresponding author
# (joint) last author

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