Title: Transient sputter yields, build-up of the altered layer and Ge-segregation as a function of the O2+ ion-fluence SiGe
Authors: Huyghebaert, Cedric
Brijs, Bert
Vandervorst, Wilfried
Issue Date: 2001
Conference: 13th International Conference on Secondary Ion Mass Spectrometry - SIMS 13; 11-16 November 2001; Nara, Japan.
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Nuclear and Radiation Physics Section
Electrical Engineering - miscellaneous

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