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Title: Ionization probability changes of the Si+ ions during the transient for 3 keV O2+ bombardment of Si
Authors: Huyghebaert, Cedric
Janssens, Tom
Brijs, Bert
Vandervorst, Wilfried
Issue Date: 2001
Conference: 13th International Conference on Secondary Ion Mass Spectrometry - SIMS 13; 11-16 November 2001; Nara, Japan.
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Nuclear and Radiation Physics Section
Physics and Astronomy - miscellaneous
Electrical Engineering - miscellaneous

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