Title: Nonlinear study of photoelectrothermal modulated optical reflectance for active dopant profile extraction
Authors: Dortu, Fabian ×
Bogdanowicz, Janusz
Clarysse, Trudo
Vandervorst, Wilfried #
Issue Date: Mar-2007
Series Title: Journal of Applied Physics vol:101 issue:5
Article number: 053107
ISSN: 0021-8979
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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