Title: Electrical characterization of advanced gate dielectrics
Authors: Degraeve, Robin
Schmitz, Jurrian
Pantisano, Luigi
Simoen, Eddy
Houssa, Michel
Kaczer, Ben
Groeseneken, Guido
Issue Date: 2007
Publisher: Wiley
Host Document: pages:371-435
Publication status: published
KU Leuven publication type: IHb
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
Semiconductor Physics Section

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