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Title: Impact of line-edge roughness on FinFET matching performance
Authors: Baravelli, Emanuele ×
Dixit, Abhisek
Rooyackers, Rita
Jurczak, Malgorzata
Speciale, Nicolo
De Meyer, Christina #
Issue Date: 2007
Series Title: IEEE Transactions on Electron Devices vol:54 issue:9 pages:2466-2474
ISSN: 0018-9383
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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