|ITEM METADATA RECORD
|Title: ||Effect of SIIS on work function of self-aligned PtSi FUSI metal gated capacitors|
|Authors: ||Van Dal, Mark ×|
Kittl, Jorge #
|Issue Date: ||2006 |
|Series Title: ||IEEE Transactions on Electron Devices vol:53 issue:5 pages:1180-1185|
|Publication status: ||published|
|KU Leuven publication type: ||IT|
|Appears in Collections:||Associated Section of ESAT - INSYS, Integrated Systems|
× corresponding author|
# (joint) last author|
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