Title: Effect of SIIS on work function of self-aligned PtSi FUSI metal gated capacitors
Authors: Van Dal, Mark ×
Pourtois, Geoffrey
Cunniffe, John
Veloso, Anabela
Lauwers, Anne
Maex, Karen
Kittl, Jorge #
Issue Date: 2006
Series Title: IEEE Transactions on Electron Devices vol:53 issue:5 pages:1180-1185
ISSN: 0018-9383
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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