Title: Interaction forces between a glass surface and silica-modified PMMA-based abrasives for CMP measured by Colloidal AFM
Authors: Armini, Silvia ×
Burtovyy, Ruslan
Luzinov, Igor
Whelan, Caroline
Maex, Karen
Moinpour, Mansour #
Issue Date: 2007
Series Title: Electrochemical and Solid-State Letters vol:10 issue:2 pages:H74-H78
ISSN: 1099-0062
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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