|ITEM METADATA RECORD
|Title: ||Interaction forces between a glass surface and silica-modified PMMA-based abrasives for CMP measured by Colloidal AFM|
|Authors: ||Armini, Silvia ×|
Moinpour, Mansour #
|Issue Date: ||2007 |
|Series Title: ||Electrochemical and Solid-State Letters vol:10 issue:2 pages:H74-H78|
|Publication status: ||published|
|KU Leuven publication type: ||IT|
|Appears in Collections:||Associated Section of ESAT - INSYS, Integrated Systems|
× corresponding author|
# (joint) last author|
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