Title: Sub-nanometer resolution dopant profiling in Si and Ge-based nanoscale devices
Authors: Vandervorst, Wilfried
Eyben, Pierre
Alvarez, David
Fouchier, Marc
Issue Date: 2004
Conference: MRS Fall Meeting Symposium O: Scanning-Probe and Other Novel Microscopies of Local Phenomena in Nanostructured Materials location:Leuven Belgium date:29/11/04
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Electrical Engineering - miscellaneous

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