|ITEM METADATA RECORD
|Title: ||Sub-nanometer resolution dopant profiling in Si and Ge-based nanoscale devices|
|Authors: ||Vandervorst, Wilfried|
|Issue Date: ||2004 |
|Conference: ||MRS Fall Meeting Symposium O: Scanning-Probe and Other Novel Microscopies of Local Phenomena in Nanostructured Materials location:Leuven Belgium date:29/11/04|
|Publication status: ||published|
|KU Leuven publication type: ||DI|
|Appears in Collections:||Electrical Engineering - miscellaneous|
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