Title: Wafer thermal desorption spectrometry in a rapid thermal processor using atmospheric pressure ionization mass spectrometry
Authors: Vereecke, Guy ×
Kondoh, Eiichi
Richardson, Paul
Maex, Karen
Heyns, Marc #
Issue Date: 2000
Publisher: Institute of Electrical and Electronics Engineers
Series Title: IEEE Transactions on Semiconductor Manufacturing vol:13 issue:3 pages:315-321
ISSN: 0894-6507
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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