ITEM METADATA RECORD
Title: Investigation of the formation process of MCs+-molecular ions during sputtering
Authors: Vlekken, J ×
D'olieslaeger, Marc
Knuyt, G
Vandervorst, Wilfried
De Schepper, Luc #
Issue Date: Jul-2000
Publisher: Elsevier Science Pub. Co.
Series Title: Journal of the American Society for Mass Spectrometry vol:11 issue:7 pages:650-658
ISSN: 1044-0305
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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