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Title: Improved phosphoric acid mixtures for nitride strip
Authors: Vos, Rita
Lux, Marcel
Conard, Thierry
De Witte, Hilde
Mertens, Paul
Heyns, Marc
Hatcher, Z
Issue Date: 2000
Conference: 5th International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS2000); 18-20 September 2000; Oostende, Belgium. location:Leuven Belgium
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Clinical Residents Medicine

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