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Title: Controlling macro- and micro-loading effects during selective epitaxial growth of SiGe with a high resolution profiler
Authors: Walczyk, Christian ×
Loo, Roger
Delande, Tinne
Caymax, Matty
Eneman, Geert
Panayotopoulos, R
Yam, Petrie #
Issue Date: 2006
Conference: KLA-Tencor Yield Managment Seminar location:Leuven Belgium
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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