|ITEM METADATA RECORD
|Title: ||Electrical evaluation and TEM/SEm investigation of a bottomless I-PVD Ta(N) barrier in a damascene architecture|
|Authors: ||Yamagishi, Hajime|
Donaton, R. A
|Issue Date: ||2000 |
|Conference: ||Advanced Metallization Conference; October 2000; San Diego, CA, USA.|
|Publication status: ||published|
|KU Leuven publication type: ||DI|
|Appears in Collections:||Associated Section of ESAT - INSYS, Integrated Systems|
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