Title: Electrical evaluation and TEM/SEm investigation of a bottomless I-PVD Ta(N) barrier in a damascene architecture
Authors: Yamagishi, Hajime
Tokei, Zsolt
Beyer, Gerald
Donaton, R. A
Bender, Hugo
Nogami, T
Maex, Karen
Issue Date: 2000
Conference: Advanced Metallization Conference; October 2000; San Diego, CA, USA.
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems

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