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Title: Advanced electrical characterization toward (sub) 1nm EOT HfSiON – hole trapping in PFET and L-dependent effects
Authors: Zahid, Mohammed ×
Pantisano, Luigi
Degraeve, Robin
Aoulaiche, Marc
Trojman, Lionel
Ferain, Isabelle
San Andres Serrano, Enrique
Groeseneken, Guido
Zhang, J.F
Heyns, Marc
Jurczak, Malgorzata
De Gendt, Stefan #
Issue Date: 2007
Publisher: IEEE
Host Document: pages:32-33
Conference: Symposium on VLSI Technology Digest of Technical Papers location:Leuven Belgium date:14/06/07
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
Molecular Design and Synthesis
Department of Materials Engineering - miscellaneous
ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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