Title: Depth profiling of strain using micro-Raman measurements
Authors: Atkinson, A ×
Jain, Suresh
Maes, Herman
Pinardi, Kuntjoro
Willander, M #
Issue Date: 2001
Publisher: IOP Pub.
Series Title: Semiconductor science and technology vol:16 issue:7 pages:584-588
ISSN: 0268-1242
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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