Title: Influence of hydrogen on chemical vapor deposition of tungsten on sputter-deposited TiN layers
Authors: Zhang, S. L ×
Palmans, Roger
Keinonen, J
Petersson, C. S
Maex, Karen #
Issue Date: 1995
Series Title: Applied Physics Letters vol:67 pages:2998-3000
ISSN: 0003-6951
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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