Title: Techniques for substrate bonding
Authors: Baert, Kris ×
Deferm, Ludo
Jansen, Philippe
Rosmeulen, Maarten
van der Groen, Sonja #
Issue Date: 1996
Host Document: pages:762-764
Conference: Micro System Technologies 96; 5th International Conferenceon Micro Electro, Opto, Mechanical Systems and Components; 17-19 Septe location:Leuven Belgium
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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