ITEM METADATA RECORD
Title: Stoichiometric changes of Si, CoSi2 and TiSi2 during low energy oxygen bombardment in combination with oxygen bleed-in
Authors: Brijs, Bert ×
Deleu, Jeroen
Storm, Wolfgang
De Coster, Walter
Vandervorst, Wilfried #
Issue Date: 1996
Series Title: Nuclear Instruments and Methods in Physics Research B vol:118 pages:541-546
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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