Title: Electrical performance and scalability of Ni-monosilicide towards sub 0.13 ?m technologies
Authors: Lauwers, A
de Potter de ten Broeck, Muriel
Lindsay, Richard
Steegen, A
Roelandts, Nico
Lossen, F
Vrancken, Christa
Maex, Karen
Issue Date: 2001
Conference: Symposium K of the MRS Spring Meeting: Gate Stack and Silicide Issues in Si Processing II; 16-20 April 2001; San Francisco, CA,
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems

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