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Title: Materials aspects, electrical performance, and scalability of Ni-silicide towards sub-0.13µm technologies
Authors: Lauwers, A
Steegen, A
de Potter de ten Broeck, Muriel
Lindsay, Richard
Satta, Alessandra
Bender, Hugo
Maex, Karen #
Issue Date: 2001
Series Title: Journal of Vacuum Science & Technology B vol:19 issue:6 pages:2026-2037
ISSN: 1071-1023
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Physics and Astronomy - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
# (joint) last author

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