This item still needs to be validated !
|ITEM METADATA RECORD
|Title: ||Materials aspects, electrical performance, and scalability of Ni-silicide towards sub-0.13µm technologies|
|Authors: ||Lauwers, A|
de Potter de ten Broeck, Muriel
Maex, Karen #
|Issue Date: ||2001 |
|Series Title: ||Journal of Vacuum Science & Technology B vol:19 issue:6 pages:2026-2037|
|Publication status: ||published|
|KU Leuven publication type: ||IT|
|Appears in Collections:||Physics and Astronomy - miscellaneous|
Associated Section of ESAT - INSYS, Integrated Systems
|Files in This Item:
There are no files associated with this item.
Request a copy
All items in Lirias are protected by copyright, with all rights reserved.
© Web of science