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Title: Process requirements for increased functionality of silicon technologies
Authors: Claeys, Cor # ×
Issue Date: 1996
Host Document: pages:T24-T30
Conference: Proceedings Segunda Workshop Iberchip; February 12-15, 1996; Sao Paulo, Brasil .
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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