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Title: Trends and challenges for advanced silicon technologies
Authors: Claeys, Cor ×
Deferm, Ludo #
Issue Date: 1996
Series Title: Diffusion and Defect Data. B: Solid State Phenomena vol:47-48 pages:1-16
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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