ITEM METADATA RECORD
Title: Optimized thermal processing for Ti-Capped CoSi2 for 0.13 µm technology
Authors: Lindsay, Richard ×
Lauwers, A
de Potter de ten Broeck, Muriel
Roelandts, Nico
Vrancken, Christa
Maex, Karen #
Issue Date: 2001
Series Title: Microelectronic Engineering vol:55 issue:01/04/07 pages:157-162
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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