Title: Optimized thermal processing for Ti-Capped CoSi2 for 0.13 µm technology
Authors: Lindsay, Richard ×
Lauwers, A
de Potter de ten Broeck, Muriel
Roelandts, Nico
Vrancken, Christa
Maex, Karen #
Issue Date: 2001
Series Title: Microelectronic Engineering vol:55 issue:01/04/07 pages:157-162
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.

© Web of science