|ITEM METADATA RECORD
|Title: ||Ge island evolution during growth, in-situ anneal, and Si capping in an industrial CVD reactor|
|Authors: ||Loo, Roger ×|
Vandervorst, Wilfried #
|Issue Date: ||2001 |
|Host Document: ||pages:A8.8.1-A8.8.6|
|Conference: ||Amorphous and Heterogeneous Silicon-Based Films location:Leuven Belgium date:16/04/01|
|Publication status: ||published|
|KU Leuven publication type: ||IC|
|Appears in Collections:||Electrical Engineering - miscellaneous|
× corresponding author|
# (joint) last author|
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