Title: Ge island evolution during growth, in-situ anneal, and Si capping in an industrial CVD reactor
Authors: Loo, Roger ×
Meunier-Beillard, Philippe
Dentel, D
Goryll, M
Vanhaeren, Danielle
Vescan, L
Bender, Hugo
Caymax, Matty
Vandervorst, Wilfried #
Issue Date: 2001
Publisher: MRS
Host Document: pages:A8.8.1-A8.8.6
Conference: Amorphous and Heterogeneous Silicon-Based Films location:Leuven Belgium date:16/04/01
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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