ITEM METADATA RECORD
Title: Surface characterization in microelectronics industry
Authors: Vandervorst, Wilfried
Bender, Hugo
Issue Date: 2004
Conference: Meeting Belgian Particle, Colloid & Interface Society - BEPCIS location:Leuven Belgium date:27/05/04
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Electrical Engineering - miscellaneous

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