Title: NBTI reliability of Ni FUSI/HfSiON gates: effect of silicide phase
Authors: Shickova, Adelina ×
Kaczer, Ben
Veloso, Anabela
Aoulaiche, Marc
Houssa, Michel
Maes, Herman
Groeseneken, Guido
Kittl, Jorge #
Issue Date: Apr-2007
Series Title: Microelectronics Reliability vol:47 issue:4-5 pages:505-507
ISSN: 0026-2714
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
Semiconductor Physics Section
Associated Section of ESAT - INSYS, Integrated Systems
ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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