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Title: Dielectric quality and reliability of FUSI/HfSiON devices with process induced strain
Authors: Shickova, Adelina ×
Kaczer, Ben
Simoen, Eddy
Verheyen, Peter
Eneman, Geert
Jurczak, Malgorzata
Absil, Philippe
Maes, Herman
Groeseneken, Guido #
Issue Date: 2007
Publisher: North-Holland
Series Title: Microelectronic Engineering vol:84 issue:9-10 pages:1906-1909
ISSN: 0167-9317
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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