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Title: On the interaction between inter-metal dielectric reliability and electromigration stress
Authors: Li, Yunlong ×
Bruynseraede, Christophe
Groeseneken, Guido
Maex, Karen
Tokei, Zsolt #
Issue Date: 2007
Host Document: pages:642-643
Conference: 45th IEEE International Reliability Physics Symposium Proceedings - IRPS location:Leuven Belgium date:14/04/07
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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