Title: Method for determining the effectiveness of silicon nitride as a barrier layer for HfO2
Authors: Kraus, Harald ×
Snow, Jim
Van Doorne, Patrick
Fyen, Wim
Mertens, Paul
Kovacs, Frederic #
Issue Date: 2004
Publisher: ECS
Host Document: pages:47-57
Conference: Physics and Technology of High-k Gate Dielectrics II location:Leuven Belgium date:12/10/03
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Clinical Residents Medicine
× corresponding author
# (joint) last author

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