Title: Super secondary grain growth initiation in electroplated copper
Authors: Vanstreels, Kris ×
Brongersma, Sywert
Demuynck, Steven
Carbonell, Laure
D'Haen, Jan
De Ceuninck, Ward
D'Olieslaeger, Marc
Maex, Karen #
Issue Date: 2006
Host Document: pages:615-621
Conference: Advanced Metallization Conference 2005 location:Diepenbeek Belgium date:26/09/05
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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