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Title: Effectiveness of nitridation of hafnium silicate dielectrics: A comparison between thermal and plasma nitridation
Authors: O'Sullivan, Barry J. ×
Kaushik, Vidya S.
Everaert, Jean-Luc
Trojman, Lionel
Ragnarsson, Lars-Ake
Pantisano, Luigi
Rohr, Erika
De Gendt, Stefan
Heyns, Marc #
Issue Date: 2007
Series Title: IEEE Transactions on Electron Devices vol:54 issue:7 pages:1771-1775
ISSN: 0018-9383
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
Molecular Design and Synthesis
Department of Materials Engineering - miscellaneous
× corresponding author
# (joint) last author

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