Title: Metal inserted poly-Si (MIPS) and FUSI dual metal (TaN and NiSi) CMOS integration
Authors: Singanamalla, Raghunath ×
Van Dal, Mark
Demand, Marc
Shamiryan, Denis
Beckx, Stephan
Jaenen, Patrick
Locorotondo, Sabrina
Yu, HongYu
Hooker, Jacob
Kubicek, Stefan
De Meyer, Christina
Biesemans, Serge
Juffermans, Casper
Lander, Rob #
Issue Date: Apr-2007
Publisher: IEEE
Conference: International Symposium on VLSI Technology, Systems, and Applications - VLSI-TSA location:Leuven Belgium date:23/04/07
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

Files in This Item:

There are no files associated with this item.

Request a copy


All items in Lirias are protected by copyright, with all rights reserved.

© Web of science