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Title: Novel EFFA-based thin-film RF-MEMS technology
Authors: Rottenberg, Xavier
Ekkels, Phillip
Brebels, Steven
Webers, Tomas
Czarnecki, Piotr
Mertens, Robert
Nauwelaers, Bart
Puers, Robert
Marchand, Laurent
De Wolf, Ingrid
De Raedt, Walter
Tilmans, Harrie #
Issue Date: Jun-2007
Host Document: Transducers & Eurosensors '07: The 14th International Conference onSolid-State Sensors, Actuators and Microsystems pages:145-148
Conference: Transducers & Eurosensors '07: The 14th International Conference onSolid-State Sensors, Actuators and Microsystems date:10 June 2007
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
ESAT- TELEMIC, Telecommunications and Microwaves
ESAT - MICAS, Microelectronics and Sensors
# (joint) last author

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