|ITEM METADATA RECORD
|Title: ||Breakdown spots on ultra-thin (EOT<1.5nm) HfO2/SiO2 stacks observed with enhanced - CAFM|
|Authors: ||Blasco, X ×|
Vandervorst, Wilfried #
|Issue Date: ||May-2005 |
|Series Title: ||Microelectronics Reliability vol:45 issue:5-6 pages:811-814|
|Publication status: ||published|
|KU Leuven publication type: ||IT|
|Appears in Collections:||Electrical Engineering - miscellaneous|
× corresponding author|
# (joint) last author|
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