Title: Breakdown spots on ultra-thin (EOT<1.5nm) HfO2/SiO2 stacks observed with enhanced - CAFM
Authors: Blasco, X ×
Nafria, M
Aymerich, X
Petry, Jasmine
Vandervorst, Wilfried #
Issue Date: May-2005
Series Title: Microelectronics Reliability vol:45 issue:5-6 pages:811-814
ISSN: 0026-2714
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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