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Title: Electrical and structural properties of oxygen-precipitation induced extended defects in silicon
Authors: Claeys, Cor ×
Simoen, Eddy
Vanhellemont, Jan #
Issue Date: 1996
Host Document: pages:I.4.1
Conference: International Conference on Extended Defects in Semiconductors (EDS '96); 8-12 Sept. 1996; Giens, France.
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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