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Title: Lattice defects in high resistivity silicon
Authors: Claeys, Cor ×
Simoen, Eddy
Vanhellemont, Jan #
Issue Date: 1996
Host Document: pages:305-324
Conference: Proceedings of the 4th International Symposium on High Purity Silicon; 6-11 October 1996; San Antonio, TX, USA.
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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