Title: Role of C and B clusters in transient diffusion of B in silicon
Authors: Cowern, Nick ×
Cacciato, A
Custer, J. S
Saris, F. W
Vandervorst, Wilfried #
Issue Date: 1996
Series Title: Applied Physics Letters vol:68 pages:1150-1152
ISSN: 0003-6951
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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