Title: Depth profiling of B through silicide on silicon structures, using secondary ion-mass spectrometry and resonant postionization mass spectrometry
Authors: De Bisschop, Peter ×
Gomez, J
Geenen, Luc
Vandervorst, Wilfried #
Issue Date: 1996
Series Title: Journal of Vacuum Science & Technology B, Microelectronics and Nanometer Structures vol:14 pages:311-323
ISSN: 1071-1023
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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