Title: Degradation and nitridation dependence of steady-state stress induced leakage current (SILC)
Authors: De Blauwe, Jan
Degraeve, Robin
Bellens, Rudi
Van Houdt, Jan
Groeseneken, Guido
Maes, Herman
Issue Date: 1996
Conference: 27th IEEE Semiconductor Interface Specialists Conference (SISC); December 5-7, 1996; San Diego, Calif., USA. location:Leuven Belgium
Publication status: published
KU Leuven publication type: DI
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
Associated Section of ESAT - INSYS, Integrated Systems

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