Title: A silicon micromachined magnetic actuator using a two layer electroplating process
Authors: De Bruyker, Dirk ×
Chévrier, Jean-Baptiste
Baert, Kris
Puers, Robert
Lowe, H #
Issue Date: 1996
Host Document: pages:88-91
Conference: Actuator 96. 5th International Conference on New Actuators. Conference Proceedings; 26-28 June 1996; Bremen, Germany. location:Leuven Belgium
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Electrical Engineering - miscellaneous
ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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