ITEM METADATA RECORD
Title: In situ observation by RBS of oxygen gettering during Cs sputtering of Si-based materials
Authors: De Coster, Walter ×
Brijs, Bert
Deleu, Jeroen
Alay, Josep Lluis
Vandervorst, Wilfried #
Issue Date: 1996
Series Title: Nuclear Instruments and Methods in Physics Research B vol:118 pages:82-87
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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