Title: Use of grazing emission XRF for silicon wafer surface contamination measurements
Authors: De Gendt, Stefan ×
Kenis, Karine
Mertens, Paul
Heyns, Marc
Claes, M
Van Grieken, R. E
Bailleul, A
Knotter, Martin
De Bokx, P. K #
Issue Date: 1996
Host Document: pages:57-60
Conference: Proceedings of the 3rd International Symposium on Ultra Clean Processing of Silicon Surfaces (UCPSS '96); 23-25 Sept. 1996; Antw location:Leuven Belgium
Publication status: published
KU Leuven publication type: IC
Appears in Collections:Clinical Residents Medicine
Surface and Interface Engineered Materials
× corresponding author
# (joint) last author

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