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Title: Quantitative carrier profiling of silicon devices by nano-srp
Authors: De Wolf, Peter
Clarysse, Trudo
Caymax, Matty
Vandervorst, Wilfried
Snauwaerts, Jan
Hellemans, Louis
Issue Date: 1996
Conference: NIST 3rd International Workshop on Industrial Applications of SPM; 2-3 May 1996; Gaithersburg, USA. location:Leuven Belgium
Publication status: published
KU Leuven publication type: DI
Appears in Collections:Electrical Engineering - miscellaneous

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