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Title: Electrical characterization of submicrometer silicon devices by cross-sectional contact-mode AFM
Authors: De Wolf, Peter ×
Trenkler, Thomas
Clarysse, Trudo
Caymax, Matty
Vandervorst, Wilfried
Snauwaerts, Jan
Hellemans, Louis #
Issue Date: 1996
Series Title: Scanning Microscopy vol:10 issue:4 pages:937-945
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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