Title: Reliability of polycrystalline silicon thin film resistors
Authors: Nakabayashi, M ×
Ohyama, Hidenori
Simoen, Eddy
Ikegami, M
Claeys, Corneel
Kobayashi, K
Yoneoka, M
Miyahara, K #
Issue Date: 2001
Series Title: Microelectronics Reliability vol:41 issue:09/10/07 pages:1341-1346
ISSN: 0026-2714
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Associated Section of ESAT - INSYS, Integrated Systems
× corresponding author
# (joint) last author

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