ITEM METADATA RECORD
Title: Importance of determining the polysilicon dopant profile during process development
Authors: Debusschere, Ingrid ×
Deferm, Ludo
Vandervorst, Wilfried #
Issue Date: 1996
Series Title: Journal of Vacuum Science & Technology B, Microelectronics and Nanometer Structures vol:14 pages:265-271
ISSN: 1071-1023
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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