Title: The behaviour of Si and CoSi2 during low energy nitrogen bombardment, with and without O-2 flooding
Authors: Deleu, Jeroen ×
Brijs, Bert
Storm, Wolfgang
Vandervorst, Wilfried
De Coster, Walter #
Issue Date: 1996
Series Title: Nuclear Instruments and Methods in Physics Research B vol:113 pages:534-538
Publication status: published
KU Leuven publication type: IT
Appears in Collections:Electrical Engineering - miscellaneous
× corresponding author
# (joint) last author

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