Title: Reliability of ultra-thin gate oxides below 3 nm in the direct tunneling regime
Authors: Depas, Michel ×
Degraeve, Robin
Nigam, Tanya
Groeseneken, Guido
Heyns, Marc #
Issue Date: 1996
Host Document: pages:533-5
Conference: Extended Abstracts of the 1996 International Conference on Solid State Devices and Materials (SSDM'96); 26-29 August 1996; Yokoh location:Leuven Belgium
Publication status: published
KU Leuven publication type: IC
Appears in Collections:ESAT - MICAS, Microelectronics and Sensors
× corresponding author
# (joint) last author

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